1. MultiLifter 

Brick Transport System

The RENA MultiLifter is designed for loading a silicon brick into the wire saw and unloading the sawn brick directly into the wafer basket of a RENA PreWaClean transportation tank.

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2. PreWaClean  

Pre-Cleaning

The new design of the RENA PreWaClean guarantees best cleaning results, minimised water consumption and an outstanding throughput.

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3.    WaSep

 
Wafer separation

A wet ribbon separates the wafers direct out from a pre-cleaning wafer basket. A breakage detection sorts out broken wafers. The integrated distribution allocates the wafers onto four and more lanes. 

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4.    InWaClean

Wafer Cleaning & Drying

The RENA InWaClean removes slurry and sawing residues from separated wafers in a physical-chemical process.

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5. Wafer Cluster

Due to technology partnerships and longtime experience RENA was able to optimise the handling and process sequence for the complete process chain after sawing.

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