PVD 

Aviza’s Sigma® fxP™  is a single wafer cluster tool designed for high-volume Physical Vapor Deposition (PVD) processing. The cluster architecture of the Sigma® fxP™ sputter deposition system offers excellent process control with high throughput. Deposition process modules are based on a standard design that enables simple technology upgrades and wafer size conversion 
 

More infoà http://www.aviza.com/products/pvd.html