1. Wafer Handling Platforms :

1. CPX Platform for volume manufacturing

The CPX provides the complete production platform to complement STS’ market-leading plasma etch and deposition technologies.   

The system consists of a single wafer automation platform, with twin vacuum cassettes and integrated wafer alignment, to service up to 4 STS plasma process modules. More info ……  

2. VPX Platform for volume manufacturing

STS’ VPX entry-level cluster platform provides production engineered wafer automation with a single vacuum cassette module and up to 3 process modules.   

Designed to reduce the cost in the production and pilot production of devices that require STS advanced plasma etching and deposition processes, the VPX enables fabs and foundries in the initial stage of introducing new device technology to maintain the highest automation standards whilst lowering the cost of ownership.  More info …… 
 
 
 

3. MACS Platform for Pilot

The MACS combines the in-vacuum wafer exchange of the MPX carousel load-lock with an atmospheric robot and cassette to offer the same throughput as a conventional single chamber vacuum cassette loaded cluster system. More info ……

4. MPX Platform for R&D

The MPX platform combines a small batch vacuum load-lock with any of STS’ etch or deposition plasma sources to produce a platform of unrivaled quality and reliability.   

The MPX platform features a unique load-lock design for small batch requirements of up to 4 substrates at 100mm or 2 substrates at 200mm.   

The MPX provides the ideal solution for R&D and pilot production environments with an easy upgrade path to cassette to cassette operation by adding a MACS module.

More info ……

5. LPX Platform for R&D

The LPX platform combines a manually-loaded, single wafer vacuum load-lock with any of STS' etch or deposition plasma sources to produce a low-cost platform for low volume or R&D applications.   

Due to the common control platform shared between STS’ platforms, the LPX provides top of class performance for all aspects of automation and interface

More info ……