ICP
ICP
Omega® ICP process module is based on a well-established design incorporating a number of enhancements driven by market & customer demands.
A high density plasma source incorporating a radial coil ICP design, the SPTS ICP process module is capable of etching a wide range of materials, including:
- GaAs
- GaN
- SiC
- Si
- AlTiC
- SixNy
SPTS ICP process modules can be found in use for applications related to…
- MEMS
- Compound Semiconductors
- Power Semiconductors